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胡腾江
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The Hybrid Fabrication Process of Metal/Silicon Composite Structure for MEMS S&A Device
Release Time:2025-04-30 Hits:
Date:
2025-04-30
Title of Paper:
The Hybrid Fabrication Process of Metal/Silicon Composite Structure for MEMS S&A Device
Journal:
Micromachines
Co-author:
Tengjiang Hu, Kuang Fang, Zhiming Zhang
Translation or Not:
No
Date of Publication:
2019-10-18

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