3D-feature-based structure design for silicon fabrication of micro devices
Release Time:2025-04-30
Hits:
- Date:
- 2025-04-30
- Title of Paper:
- 3D-feature-based structure design for silicon fabrication of micro devices
- Journal:
- Microsystem Technologies
- Summary:
- 3D-feature-based structure design for silicon fabrication of micro devices
- Co-author:
- Liu Y, Jiang PY, Zhang DH, Zhou GH
- Volume:
- 13(7)
- Page Number:
- 701-714
- Translation or Not:
- No
- Date of Publication:
- 2007-07-01