Molecular Dynamics Simulation of the Deposition Process of Hydrogenated DLC Films
发布时间：2025-04-30
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- 发布时间：
- 2025-04-30
- 论文名称：
- Molecular Dynamics Simulation of the Deposition Process of Hydrogenated DLC Films
- 发表刊物：
- Chinese Science Bulletin
- 摘要：
- The deposition process of hydrogenated diamond-like carbon (DLC) film greatly affects its frictional properties. In this study, CH3 radicals are selected as source species to deposit hydrogenated DLC films for molecular dynamics simulation. The growth and structural properties of hydrogenated DLC films are investigated and elucidated in detail. By comparison and statistical analysis, the authors find that the ratio of carbon to hydrogen in the films generally shows a monotonously increasing trend with the increase of impact energy. Carbon atoms are more reactive during deposition and more liable to bond with substrate atoms than hydrogen atoms. In addition, there exists a peak value of the number of hydrogen atoms deposited in hydrogenated DLC films. The trends of the variation are opposite on the two sides of this peak point, and it becomes stable when impact energy is greater than 80 eV. The average relative density also indicates a rising trend along with the increment of impact energy, while it does not reach the saturation value until impact energy comes to 50 eV. The hydrogen content in source species is a key factor to determine the hydrogen content in hydrogenated DLC films. When the hydrogen content in source species is high, the hydrogen content in hydrogenated DLC films is accordingly high.
- 合写作者：
- Guang-Neng Dong，el
- 卷号：
- 2008,53(7)
- 页面范围：
- 1094-1099
- 是否译文：
- 否
- 发表时间：
- 2007-07-23