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陈烽

教授 博士生导师 硕士生导师

  • 学历: 硕博连读
  • 学位: 博士

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国际著名激光与光电子科学评论媒体《Laser Focus World》对本课题组在高性能微透镜阵列飞秒激光微纳制造方面的进展作专题报道和评论

发布时间:2012-07-18
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发布时间:
2012-07-18
文章标题:
国际著名激光与光电子科学评论媒体《Laser Focus World》对本课题组在高性能微透镜阵列飞秒激光微纳制造方面的进展作专题报道和评论
内容:

国际著名激光与光电子科学评论媒体《Laser Focus World》对本课题组在高性能微透镜阵列飞秒激光微纳制造方面的进展作专题报道和评论:

链接地址:

Femtosecond-laser wet etch forms low-cost microlens arrays, Laser Focus World Volume 48, Issue 7, Pages 9-12 (2012);http://www.laserfocusworld.com/articles/print/volume-48/issue007/newsbreaks/femtosecond-laser-wet-etch-forms-low-cost-microlens-arrays.html.

 

《Femtosecond-laser wet etch forms low-cost microlens arrays》

 

07/03/2012

Polymer micro-optical elements or microlens arrays are typically fabricated using photoresist reflow, photolithography, and LIGA methods that require expensive masks and complex processing steps, or by maskless inkjet and self-assembly processes that limit lens quality. And while laser-direct-writing processes such as two-photon-polymerization (TPP) produce high-quality arrays, the point-by-point fabrication process is extremely slow. Researchers at Xi’an Jiaotong University (Xi’an, China), however, have created a modified laser-direct-writing process that rapidly creates high-quality glass microlens masters that can be used to replicate polymer arrays.
 

Femtosecond-laser wet etch forms low-cost microlens arrays
 

In the process, an 800 nm ultrafast laser delivers intensity- and time-controlled, carefully arranged, individual pulses to a glass slide that is then subjected to wet-etch processing. The laser pulses change the physical and chemical properties of the glass in the focal spots, and the wet-etch processing that follows carves out a unique microlens array pattern. An 80-μm-diameter glass mold with more than 16,000 concave structures can be fabricated in less than three hours, improving significantly on TPP processing and enabling a variety of different glass “master” shapes such as circular, rectangular, diamond, and octagonal designs. Contact Feng Chen at chenfeng@mail.xjtu.edu.cn.